e-Guns for Thin Film & Optical Coatings 薄膜和光学镀膜电子枪 Hanks HM2TM e-Gun
• Patented, award-winning, modular magnet beam focusing system; higher efficiency, improved beam collimation, no beam ”curl ”
一流的专利产品，模块化的永磁电子束聚焦系统；更高的效能，改良的束瞄准，电子束无扭曲 • Improved emitter and sweep coil assemblies 改良的束发射器和扫描线圈总成
• 0-200 Hz sweep, repeatable, uniform evaporation, no
“tunneling ” 0-200Hz 扫描，蒸发的重复性、均匀性好，无“沟道” • Precise and stable evaporation rates to as low as 1-2 A/sec 精确和稳定的蒸发速率，可低至1-2 A/秒
• 35% smaller than traditional evaporation sources, yet provides the same crucible volume, evaporation rate, and power capability of physically large guns.
比传统的蒸发源小35%，但能提供相同的坩埚容量和蒸发速率， 可使用大容量的电子枪电源
• High and Ultra High Vacuum compatible 兼容高真空或者超高真空 • Accessories 相应的配套设备 • Crucible liners 可用坩埚内衬
Hanks HM²Triad e-Gun
Hanks HM² e-Guns are manufactured protected under one or more of the following patents: 4,835,89; 4,891,821; 4,947,404
TM
DE TECHNOLOGY
Models 型号：
• 6-20kW 7-156cc crucible volumes
功率6-20千瓦，坩埚容量7-156毫升
• Hydra 10 crucible with 6 emitters, simultanuous/ sequential evaporation of up to six materials
Hydra 10个坩埚6个束发射器，同时或连续蒸发多达六种材料
• Triad 3 crucible source Triad 3个坩埚源
• Twin 2 crucible source Twin 2个坩埚源
• Single 1 crucible source Single 1个坩埚源
Hanks HM² Hydra-2
Rotary 旋转式
• 6-10 kw 7-15 cc crucible volumes 功率为6-10千瓦，坩埚容量7-15 毫升 • Four crucible 4个坩埚源
Hanks HM2 Single Crucible e-Guns
UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
兼容超高真空
金属密封，完全兼容超高真空，真空度可达2 x 10 Torr
-11
Hanks HM2 Multiple Crucible Rotary e-Gun
Modular Magnets / 模块化的磁铁
The unique modular magnet concept is incorporated in the multiple
crucible rotary Hanks HM2 e-Gun design. This concept makes possible a
2
very compact unit. All of the Hanks HM unique features are incorporated in this model.
在Hanks HM电子枪里引入了独有的模块化磁铁概念，使Hanks HM电子枪的结构更加紧凑，这个独有的特点用到了这个型号。 High Vacuum Compatible / 高真空的兼容性
Metal and elastomer seals, measured base pressure: 2 x 10-9 Torr. 金属和橡胶密封，真空度可到2 x 10-9 Torr Specifications / 技术规格
2
2
The Hydra design consists of a compact array of crucibles and electron emitters which translate linearly with respect to each other to provide for the co-deposition of up to six different materials simultaneously.
Hydra 的设计包括一个紧凑的坩埚阵列和相应的直线排列的电子束发射器，可以同时共蒸发多达六种不同的材料。
Innovative technology and a creative approach to magnetic field concepts has been fostered by Thermionics to result in several new, unique electron emission configurations. The Hydra configuration eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.
Thermionics 引进了新技术，独创新的磁场概念，配备独特的电子束发射装置，使Hydra 无需复杂的电子束导向和笨重的磁场分流部件，就可以消除临近源的相互干扰。每个源有独立的水冷防止水汽的集结。每个源配有独立的扫描线圈，所有的源都有独立的参数来进行独立操作。
Co-Evaporation Technology: 共沉积技术：
Single Array—5 crucibles, 1-3 emitters
单列：5个坩埚，1-3个电子束发射器
Dual Array—10 crucibles, 2-6 emitters
双列：10个坩埚，2-6个电子束发射器
Specifications / 技术规格
Hanks HM2 Triad e-Gun
Specifications 技术规格
e-Guns for Thin Film & Optical Coatings 薄膜和光学镀膜电子枪 Hanks HM2TM e-Gun
• Patented, award-winning, modular magnet beam focusing system; higher efficiency, improved beam collimation, no beam ”curl ”
一流的专利产品，模块化的永磁电子束聚焦系统；更高的效能，改良的束瞄准，电子束无扭曲 • Improved emitter and sweep coil assemblies 改良的束发射器和扫描线圈总成
• 0-200 Hz sweep, repeatable, uniform evaporation, no
“tunneling ” 0-200Hz 扫描，蒸发的重复性、均匀性好，无“沟道” • Precise and stable evaporation rates to as low as 1-2 A/sec 精确和稳定的蒸发速率，可低至1-2 A/秒
• 35% smaller than traditional evaporation sources, yet provides the same crucible volume, evaporation rate, and power capability of physically large guns.
比传统的蒸发源小35%，但能提供相同的坩埚容量和蒸发速率， 可使用大容量的电子枪电源
• High and Ultra High Vacuum compatible 兼容高真空或者超高真空 • Accessories 相应的配套设备 • Crucible liners 可用坩埚内衬
Hanks HM²Triad e-Gun
Hanks HM² e-Guns are manufactured protected under one or more of the following patents: 4,835,89; 4,891,821; 4,947,404
TM
DE TECHNOLOGY
Models 型号：
• 6-20kW 7-156cc crucible volumes
功率6-20千瓦，坩埚容量7-156毫升
• Hydra 10 crucible with 6 emitters, simultanuous/ sequential evaporation of up to six materials
Hydra 10个坩埚6个束发射器，同时或连续蒸发多达六种材料
• Triad 3 crucible source Triad 3个坩埚源
• Twin 2 crucible source Twin 2个坩埚源
• Single 1 crucible source Single 1个坩埚源
Hanks HM² Hydra-2
Rotary 旋转式
• 6-10 kw 7-15 cc crucible volumes 功率为6-10千瓦，坩埚容量7-15 毫升 • Four crucible 4个坩埚源
Hanks HM2 Single Crucible e-Guns
UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
兼容超高真空
金属密封，完全兼容超高真空，真空度可达2 x 10 Torr
-11
Hanks HM2 Multiple Crucible Rotary e-Gun
Modular Magnets / 模块化的磁铁
The unique modular magnet concept is incorporated in the multiple
crucible rotary Hanks HM2 e-Gun design. This concept makes possible a
2
very compact unit. All of the Hanks HM unique features are incorporated in this model.
在Hanks HM电子枪里引入了独有的模块化磁铁概念，使Hanks HM电子枪的结构更加紧凑，这个独有的特点用到了这个型号。 High Vacuum Compatible / 高真空的兼容性
Metal and elastomer seals, measured base pressure: 2 x 10-9 Torr. 金属和橡胶密封，真空度可到2 x 10-9 Torr Specifications / 技术规格
2
2
The Hydra design consists of a compact array of crucibles and electron emitters which translate linearly with respect to each other to provide for the co-deposition of up to six different materials simultaneously.
Hydra 的设计包括一个紧凑的坩埚阵列和相应的直线排列的电子束发射器，可以同时共蒸发多达六种不同的材料。
Innovative technology and a creative approach to magnetic field concepts has been fostered by Thermionics to result in several new, unique electron emission configurations. The Hydra configuration eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.
Thermionics 引进了新技术，独创新的磁场概念，配备独特的电子束发射装置，使Hydra 无需复杂的电子束导向和笨重的磁场分流部件，就可以消除临近源的相互干扰。每个源有独立的水冷防止水汽的集结。每个源配有独立的扫描线圈，所有的源都有独立的参数来进行独立操作。
Co-Evaporation Technology: 共沉积技术：
Single Array—5 crucibles, 1-3 emitters
单列：5个坩埚，1-3个电子束发射器
Dual Array—10 crucibles, 2-6 emitters
双列：10个坩埚，2-6个电子束发射器
Specifications / 技术规格
Hanks HM2 Triad e-Gun
Specifications 技术规格